This pump is a high-function pump for slurry supply/circulation.
Since the bellows is designed for vertical type, the slurry will not be accumulated at the bellows.
Features
  • Since the fluid flows ideally, it is hardly accumulated at the folds of bellows.
  • This pump is applicable to the metal-base slurry of which precipitation speed is high, as well as to the silica-base slurry.
  • Unique bellows produced on the basis of experience cultivated for a long time.
  • Since the liquid contact points are all made of fluorine plastic, the cleanliness is assured without generation of any particle.
  • Using the slurry pump together with dedicated accumulator in combination allows the slurry to be discharged at low pulsation.
Applications
  • Pump used to transfer the slurry from raw liquid tank or mixing tank to CMP unit.
  • Pump used to circulate the slurry all the time for prevention of slurry from sedimentation when the liquid is not transferred.
Performance

Type PC-10MB
– Maximum discharge(L/min.):12
– Maximum supply air pressure(MPa):0.5
– Working temperature(°C):10 – 100
Type PC-20MB
– Maximum discharge(L/min.):24
– Maximum supply air pressure(MPa):0.5
– Working temperature(°C):10 – 100
Type PC-40MB
– Maximum discharge(L/min.):48
– Maximum supply air pressure(MPa):0.5
– Working temperature(°C):10 – 100